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2025
- Jan 07 Silicon carbide chemical vapor deposition apparatus
- Jan 07 Method for manufacturing semiconductor process tray with excellent flatness
- Feb 13 Heterogeneous junction showerhead assembly for semiconductor manufacturing equipment
- Mar 31 Silicon carbide chemical vapor deposition apparatus including corrosion prevention structure
- Oct 29 Thread tap for silicon carbide processing
2023
- Aug 01 Electrolyte substrate manufacturing method and solid oxide fuel cell manufacturing method
2022
- Dec 02 High-resistivity silicon carbide component formation method and high-resistivity silicon carbide component
2021
- Apr 22 Batch processing apparatus and method for regenerating silicon carbide products using the same
2019
- Jul 09 Multi-stage support and batch processing apparatus
- Aug 27 Method for regenerating silicon carbide products and regenerated silicon carbide products
